%0 Journal Article %1 journals/mr/LanzaPNBFRLJ07 %A Lanza, Mario %A Porti, Marc %A Nafría, Montserrat %A Benstetter, Guenther %A Frammelsberger, Werner %A Ranzinger, Heiko %A Lodermeier, E. %A Jaschke, G. %D 2007 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1424-1428 %T Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#LanzaPNBFRLJ07 %V 47

@article{journals/mr/LanzaPNBFRLJ07, added-at = {2022-12-07T00:00:00.000+0100}, author = {Lanza, Mario and Porti, Marc and Nafría, Montserrat and Benstetter, Guenther and Frammelsberger, Werner and Ranzinger, Heiko and Lodermeier, E. and Jaschke, G.}, biburl = {https://www.bibsonomy.org/bibtex/233111b319df4222730b0ac42df6e822c/dblp}, ee = {https://www.wikidata.org/entity/Q60229123}, interhash = {8dfc8f8c094c129f68efb81900496b98}, intrahash = {33111b319df4222730b0ac42df6e822c}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1424-1428}, timestamp = {2024-04-09T02:48:37.000+0200}, title = {Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#LanzaPNBFRLJ07}, volume = 47, year = 2007 }