%0 Conference Paper %1 conf/nems/WangXCHWS13 %A Wang, Xinghua %A Xiao, Dingbang %A Chen, Zhihua %A Hou, Zhanqiang %A Wu, Xuezhong %A Su, Jianbin %B NEMS %D 2013 %I IEEE %K dblp %P 1046-1049 %T Micro-fabricated polymeric thermal actuators array for rectifying the deformation of MEMS substrate. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#WangXCHWS13

@inproceedings{conf/nems/WangXCHWS13, added-at = {2017-05-17T00:00:00.000+0200}, author = {Wang, Xinghua and Xiao, Dingbang and Chen, Zhihua and Hou, Zhanqiang and Wu, Xuezhong and Su, Jianbin}, biburl = {https://www.bibsonomy.org/bibtex/21dd5e7e8abdd1322e12cee063c109b05/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559902}, interhash = {8f72d02bf00cc67c78df356b92dc1887}, intrahash = {1dd5e7e8abdd1322e12cee063c109b05}, keywords = {dblp}, pages = {1046-1049}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:37.000+0200}, title = {Micro-fabricated polymeric thermal actuators array for rectifying the deformation of MEMS substrate.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#WangXCHWS13}, year = 2013 }