%0 Conference Paper %1 conf/nems/ZhangLXFYCZG23 %A Zhang, Muyang %A Li, Haonan %A Xiao, Zhiqing %A Feng, Zitao %A Yu, Shangneng %A Chen, Zejingqiu %A Zhang, Huiru %A Guo, Weijin %B NEMS %D 2023 %I IEEE %K dblp %P 104-107 %T Fabrication of Concave Microwells and Microchannels by Off-stoichiometry Thiol-ene (OSTE) Backside Lithography. %U http://dblp.uni-trier.de/db/conf/nems/nems2023.html#ZhangLXFYCZG23 %@ 979-8-3503-3348-0

@inproceedings{conf/nems/ZhangLXFYCZG23, added-at = {2023-08-14T00:00:00.000+0200}, author = {Zhang, Muyang and Li, Haonan and Xiao, Zhiqing and Feng, Zitao and Yu, Shangneng and Chen, Zejingqiu and Zhang, Huiru and Guo, Weijin}, biburl = {https://www.bibsonomy.org/bibtex/2bab86e16d37fffca32745670677cf658/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2023}, ee = {https://doi.org/10.1109/NEMS57332.2023.10190903}, interhash = {900a163e789a36de2b7a40a7ae74dd95}, intrahash = {bab86e16d37fffca32745670677cf658}, isbn = {979-8-3503-3348-0}, keywords = {dblp}, pages = {104-107}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:20.000+0200}, title = {Fabrication of Concave Microwells and Microchannels by Off-stoichiometry Thiol-ene (OSTE) Backside Lithography.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2023.html#ZhangLXFYCZG23}, year = 2023 }