%0 Journal Article %1 journals/mr/RothschildMKSEDCRVVVLBDJNAB07 %A Rothschild, A. %A Mitsuhashi, R. %A Kerner, Christoph %A Shi, X. %A Everaert, J. L. %A Date, L. %A Conard, Thierry %A Richard, Olivier %A Vrancken, C. %A Verbeeck, R. %A Veloso, Anabela %A Lauwers, A. %A de Potter de ten Broeck, Muriel %A Debusschere, I. %A Jurczak, M. %A Niwa, M. %A Absil, Philippe %A Biesemans, S. %D 2007 %J Microelectron. Reliab. %K dblp %N 4-5 %P 521-524 %T Optimization of HfSiON using a design of experiment (DOE) approach on 0.45 V Vt Ni-FUSI CMOS transistors. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#RothschildMKSEDCRVVVLBDJNAB07 %V 47

@article{journals/mr/RothschildMKSEDCRVVVLBDJNAB07, added-at = {2024-03-13T00:00:00.000+0100}, author = {Rothschild, A. and Mitsuhashi, R. and Kerner, Christoph and Shi, X. and Everaert, J. L. and Date, L. and Conard, Thierry and Richard, Olivier and Vrancken, C. and Verbeeck, R. and Veloso, Anabela and Lauwers, A. and de Potter de ten Broeck, Muriel and Debusschere, I. and Jurczak, M. and Niwa, M. and Absil, Philippe and Biesemans, S.}, biburl = {https://www.bibsonomy.org/bibtex/21177f9bcc535a18789b759b718f59d6a/dblp}, ee = {https://doi.org/10.1016/j.microrel.2007.01.042}, interhash = {90daa64651b82812f9869cadb4c1803b}, intrahash = {1177f9bcc535a18789b759b718f59d6a}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {4-5}, pages = {521-524}, timestamp = {2024-04-09T02:48:51.000+0200}, title = {Optimization of HfSiON using a design of experiment (DOE) approach on 0.45 V Vt Ni-FUSI CMOS transistors.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#RothschildMKSEDCRVVVLBDJNAB07}, volume = 47, year = 2007 }