On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies.
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%0 Journal Article
%1 journals/mr/ZaghloulPBCPP11
%A Zaghloul, Usama
%A Papaioannou, George J.
%A Bhushan, Bharat
%A Coccetti, Fabio
%A Pons, Patrick
%A Plana, Robert
%D 2011
%J Microelectron. Reliab.
%K dblp
%N 9-11
%P 1810-1818
%T On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies.
%U http://dblp.uni-trier.de/db/journals/mr/mr51.html#ZaghloulPBCPP11
%V 51
@article{journals/mr/ZaghloulPBCPP11,
added-at = {2022-10-02T00:00:00.000+0200},
author = {Zaghloul, Usama and Papaioannou, George J. and Bhushan, Bharat and Coccetti, Fabio and Pons, Patrick and Plana, Robert},
biburl = {https://www.bibsonomy.org/bibtex/259763b0662d93ab19c8b2150beabdef4/dblp},
ee = {https://www.wikidata.org/entity/Q58799725},
interhash = {966991a6ba18ec3f52943eaf64fc0dbf},
intrahash = {59763b0662d93ab19c8b2150beabdef4},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = {9-11},
pages = {1810-1818},
timestamp = {2024-04-09T02:50:29.000+0200},
title = {On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr51.html#ZaghloulPBCPP11},
volume = 51,
year = 2011
}
