Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency.
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%0 Journal Article
%1 journals/mr/KalicinskiWW08
%A Kalicinski, Stanislaw
%A Wevers, Martine
%A Wolf, Ingrid De
%D 2008
%J Microelectron. Reliab.
%K dblp
%N 8-9
%P 1221-1226
%T Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency.
%U http://dblp.uni-trier.de/db/journals/mr/mr48.html#KalicinskiWW08
%V 48
@article{journals/mr/KalicinskiWW08,
added-at = {2020-10-26T00:00:00.000+0100},
author = {Kalicinski, Stanislaw and Wevers, Martine and Wolf, Ingrid De},
biburl = {https://www.bibsonomy.org/bibtex/203b8241a9690c79ee42deaea16082ceb/dblp},
ee = {https://doi.org/10.1016/j.microrel.2008.07.024},
interhash = {99831793f07c67e44fc27bbf8fe422df},
intrahash = {03b8241a9690c79ee42deaea16082ceb},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = {8-9},
pages = {1221-1226},
timestamp = {2020-10-27T12:44:52.000+0100},
title = {Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr48.html#KalicinskiWW08},
volume = 48,
year = 2008
}
