%0 Conference Paper %1 conf/robio/WuS05 %A Wu, Shih-Jeh %A Shen, Ting-Wai %B ROBIO %D 2005 %I IEEE %K dblp %P 444-449 %T Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering. %U http://dblp.uni-trier.de/db/conf/robio/robio2005.html#WuS05 %@ 0-7803-9315-5

@inproceedings{conf/robio/WuS05, added-at = {2017-05-24T00:00:00.000+0200}, author = {Wu, Shih-Jeh and Shen, Ting-Wai}, biburl = {https://www.bibsonomy.org/bibtex/28249391b7a619db8d9821dc5de144581/dblp}, booktitle = {ROBIO}, crossref = {conf/robio/2005}, ee = {https://doi.org/10.1109/ROBIO.2005.246308}, interhash = {99d811f4bea898e2202713026be42dd4}, intrahash = {8249391b7a619db8d9821dc5de144581}, isbn = {0-7803-9315-5}, keywords = {dblp}, pages = {444-449}, publisher = {IEEE}, timestamp = {2019-10-17T22:02:44.000+0200}, title = {Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering.}, url = {http://dblp.uni-trier.de/db/conf/robio/robio2005.html#WuS05}, year = 2005 }