%0 Conference Paper %1 conf/3dic/TanikawaKFKT15 %A Tanikawa, Seiya %A Kino, Hisashi %A Fukushima, Takafumi %A Koyanagi, Mitsumasa %A Tanaka, Tetsu %B 3DIC %D 2015 %I IEEE %K dblp %P TS3.1.1-TS3.1.4 %T Novel local stress evaluation method in 3D IC using DRAM cell array with planar mOS capacitors. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#TanikawaKFKT15 %@ 978-1-4673-9385-0

@inproceedings{conf/3dic/TanikawaKFKT15, added-at = {2021-10-14T00:00:00.000+0200}, author = {Tanikawa, Seiya and Kino, Hisashi and Fukushima, Takafumi and Koyanagi, Mitsumasa and Tanaka, Tetsu}, biburl = {https://www.bibsonomy.org/bibtex/28c02f91cc9647da4b40bf09d768a6fd0/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2015}, ee = {https://doi.org/10.1109/3DIC.2015.7334557}, interhash = {9ffd65f33793fde8b36dbb914931eab8}, intrahash = {8c02f91cc9647da4b40bf09d768a6fd0}, isbn = {978-1-4673-9385-0}, keywords = {dblp}, pages = {TS3.1.1-TS3.1.4}, publisher = {IEEE}, timestamp = {2024-04-10T12:10:59.000+0200}, title = {Novel local stress evaluation method in 3D IC using DRAM cell array with planar mOS capacitors.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#TanikawaKFKT15}, year = 2015 }