%0 Conference Paper %1 conf/wsc/KabakHK12 %A Kabak, Kamil Erkan %A Heavey, Cathal %A Kernan, Brian %B WSC %D 2012 %E Rose, Oliver %E Uhrmacher, Adelinde M. %I WSC %K dblp %P 203:1-203:11 %T Single toolset modeling approaches in semiconductor manufacturing. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2012.html#KabakHK12 %@ 978-1-4673-4781-5

@inproceedings{conf/wsc/KabakHK12, added-at = {2021-06-10T00:00:00.000+0200}, author = {Kabak, Kamil Erkan and Heavey, Cathal and Kernan, Brian}, biburl = {https://www.bibsonomy.org/bibtex/2bd5abb9d42356b1f38e8299beabbbe67/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2012}, editor = {Rose, Oliver and Uhrmacher, Adelinde M.}, ee = {http://dl.acm.org/citation.cfm?id=2430031}, interhash = {a665cc8ab2ea3971876b282e4d071051}, intrahash = {bd5abb9d42356b1f38e8299beabbbe67}, isbn = {978-1-4673-4781-5}, keywords = {dblp}, pages = {203:1-203:11}, publisher = {WSC}, timestamp = {2024-04-09T16:49:03.000+0200}, title = {Single toolset modeling approaches in semiconductor manufacturing.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2012.html#KabakHK12}, year = 2012 }