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%0 Thesis
%1 kadinski1996mathematische
%A Kadinski, Lev
%D 1996
%K
%T Mathematische Modellierung und numerische Simulation von CVD-Prozessen in der Halbleitertechnik
@phdthesis{kadinski1996mathematische,
added-at = {2023-12-12T19:01:01.000+0100},
author = {Kadinski, Lev},
biburl = {https://www.bibsonomy.org/bibtex/253a007ce6f96c1386e9fa02569eb964f/admin},
dnbtitleid = {94904735X},
interhash = {1a889765cb035689b3d67e7cfc99d6f9},
intrahash = {53a007ce6f96c1386e9fa02569eb964f},
keywords = {},
school = {Uni Erlangen-Nürnberg},
timestamp = {2023-12-12T19:01:01.000+0100},
title = {Mathematische Modellierung und numerische Simulation von CVD-Prozessen in der Halbleitertechnik},
year = 1996
}