%0 Conference Paper %1 conf/nems/ZhengYSSC11 %A Zheng, Xiaoshan %A Yan, Xin %A Song, Zijun %A San, Haisheng %A Chen, Xuyuan %B NEMS %D 2011 %I IEEE %K dblp %P 764-767 %T Direct Al-Al contact in silicon-Pyrex7740 anodic bonding for hermetic package and electrical interconnecting. %U http://dblp.uni-trier.de/db/conf/nems/nems2011.html#ZhengYSSC11 %@ 978-1-61284-775-7

@inproceedings{conf/nems/ZhengYSSC11, added-at = {2017-05-17T00:00:00.000+0200}, author = {Zheng, Xiaoshan and Yan, Xin and Song, Zijun and San, Haisheng and Chen, Xuyuan}, biburl = {https://www.bibsonomy.org/bibtex/2a756ec52464a3fcde2972fdeb440233c/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2011}, ee = {https://doi.org/10.1109/NEMS.2011.6017466}, interhash = {af43a95ac19e23b4754d1563753c6eee}, intrahash = {a756ec52464a3fcde2972fdeb440233c}, isbn = {978-1-61284-775-7}, keywords = {dblp}, pages = {764-767}, publisher = {IEEE}, timestamp = {2019-10-17T22:12:53.000+0200}, title = {Direct Al-Al contact in silicon-Pyrex7740 anodic bonding for hermetic package and electrical interconnecting.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2011.html#ZhengYSSC11}, year = 2011 }