%0 Journal Article %1 journals/mr/LangenbuchBVG05 %A Langenbuch, M. %A Bottini, R. %A Vitali, Maria Elena %A Ghidini, G. %D 2005 %J Microelectron. Reliab. %K dblp %N 5-6 %P 875-878 %T In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#LangenbuchBVG05 %V 45

@article{journals/mr/LangenbuchBVG05, added-at = {2024-01-16T00:00:00.000+0100}, author = {Langenbuch, M. and Bottini, R. and Vitali, Maria Elena and Ghidini, G.}, biburl = {https://www.bibsonomy.org/bibtex/2a9c47f1c7fb38dfe4ce91ea4ea156708/dblp}, ee = {https://doi.org/10.1016/j.microrel.2004.10.026}, interhash = {afd1a384b40c9deba59dd4f5900840c5}, intrahash = {a9c47f1c7fb38dfe4ce91ea4ea156708}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {5-6}, pages = {875-878}, timestamp = {2024-04-09T02:49:44.000+0200}, title = {In situ steam generation (ISSG) versus standard steam technology: impact on oxide reliability.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#LangenbuchBVG05}, volume = 45, year = 2005 }