%0 Conference Paper %1 conf/nems/GongTSLNL09 %A Gong, Jie %A Tang, Zirong %A Shi, Tielin %A Liao, Guanglan %A Nie, Lei %A Liu, Shiyuan %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 624-627 %T Improved adhesion between C-MEMS and substrate by micromechanical interlocking. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#GongTSLNL09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/GongTSLNL09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Gong, Jie and Tang, Zirong and Shi, Tielin and Liao, Guanglan and Nie, Lei and Liu, Shiyuan}, biburl = {https://www.bibsonomy.org/bibtex/2034f3e3e499fe917915883767e33bc39/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068658}, interhash = {b429522b71df490903a3b919c5deac54}, intrahash = {034f3e3e499fe917915883767e33bc39}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {624-627}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {Improved adhesion between C-MEMS and substrate by micromechanical interlocking.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#GongTSLNL09}, year = 2009 }