%0 Conference Paper %1 conf/nems/WuBTAZB13 %A Wu, Songmei %A Bammatter, M.-O. %A Tang, Wei %A Auzelyte, V. %A Zhang, Haixia %A Brugger, Juergen %B NEMS %D 2013 %I IEEE %K dblp %P 986-989 %T High aspect ratio etching of nanopores in PECVD SiC through AAO mask. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#WuBTAZB13

@inproceedings{conf/nems/WuBTAZB13, added-at = {2023-09-30T00:00:00.000+0200}, author = {Wu, Songmei and Bammatter, M.-O. and Tang, Wei and Auzelyte, V. and Zhang, Haixia and Brugger, Juergen}, biburl = {https://www.bibsonomy.org/bibtex/2f32714bd069ad284d8e7f7635f5eb9ba/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559887}, interhash = {bb5e5acc4ed77c269b2c2bb4ec974756}, intrahash = {f32714bd069ad284d8e7f7635f5eb9ba}, keywords = {dblp}, pages = {986-989}, publisher = {IEEE}, timestamp = {2024-04-10T19:55:39.000+0200}, title = {High aspect ratio etching of nanopores in PECVD SiC through AAO mask.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#WuBTAZB13}, year = 2013 }