%0 Journal Article %1 journals/jsce/LuYZWZY18 %A Lu, Sen %A Yang, Kaiming %A Zhu, Yu %A Wang, Leijie %A Zhang, Ming %A Yang, Jin %D 2018 %J J. Syst. Control. Eng. %K dblp %N 7 %P 869-878 %T Yaw error correction of ultra-precision stage for scanning beam interference lithography systems. %U http://dblp.uni-trier.de/db/journals/jsce/jsce232.html#LuYZWZY18 %V 232

@article{journals/jsce/LuYZWZY18, added-at = {2020-09-18T00:00:00.000+0200}, author = {Lu, Sen and Yang, Kaiming and Zhu, Yu and Wang, Leijie and Zhang, Ming and Yang, Jin}, biburl = {https://www.bibsonomy.org/bibtex/2c5b47c05b2d782c170621a09fed01126/dblp}, ee = {https://doi.org/10.1177/0959651818766197}, interhash = {bb7c722583163eff98cebda23425f26c}, intrahash = {c5b47c05b2d782c170621a09fed01126}, journal = {J. Syst. Control. Eng.}, keywords = {dblp}, number = 7, pages = {869-878}, timestamp = {2020-09-19T11:44:03.000+0200}, title = {Yaw error correction of ultra-precision stage for scanning beam interference lithography systems.}, url = {http://dblp.uni-trier.de/db/journals/jsce/jsce232.html#LuYZWZY18}, volume = 232, year = 2018 }