%0 Thesis %1 schaffert2004numerische %A Schaffert, Volker %D 2004 %K %T Numerische Strömungssimulation in 13,56-MHz-Hohlkathoden-Plasmajet- Plasmaquellen für Oberflächenprozesse

@phdthesis{schaffert2004numerische, added-at = {2023-12-13T07:48:05.000+0100}, author = {Schaffert, Volker}, biburl = {https://www.bibsonomy.org/bibtex/232cc92ae60ad7048abeb6c30fc5d1d9e/admin}, dnbtitleid = {972431403}, interhash = {bd65cced8c91766282ebeb1ed1b3d2ac}, intrahash = {32cc92ae60ad7048abeb6c30fc5d1d9e}, keywords = {}, school = {Uni Wuppertal}, timestamp = {2023-12-13T07:48:05.000+0100}, title = {Numerische Strömungssimulation in 13,56-MHz-Hohlkathoden-Plasmajet- Plasmaquellen für Oberflächenprozesse}, year = 2004 }