%0 Conference Paper %1 conf/nems/ChungJ09 %A Chung, Chen-Kuei %A Jhu, J. J. %B NEMS %D 2009 %I IEEE Computer Society %K dblp %P 783-786 %T Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims. %U http://dblp.uni-trier.de/db/conf/nems/nems2009.html#ChungJ09 %@ 978-1-4244-4629-2

@inproceedings{conf/nems/ChungJ09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Chung, Chen-Kuei and Jhu, J. J.}, biburl = {https://www.bibsonomy.org/bibtex/24c18853092a24e4a72d20374a33e398d/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2009}, ee = {https://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068695}, interhash = {cc7f2f4dc86e9b2b3c7746fd60c49e26}, intrahash = {4c18853092a24e4a72d20374a33e398d}, isbn = {978-1-4244-4629-2}, keywords = {dblp}, pages = {783-786}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T19:56:10.000+0200}, title = {Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2009.html#ChungJ09}, year = 2009 }