Inproceedings,
Fabrication Processes for Packaged Optical MEMS Devices.
S. Samson, R. Agarwal, S. Kedia, W. Wang, S. Onishi, and J. Bumgarner.ICMENS, page 113-120. IEEE Computer Society, (2005)
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- conf/icmens/SamsonAKWOB05
- entry type
- inproceedings
- booktitle
- ICMENS
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- 2005
- pages
- 113-120
- publisher
- IEEE Computer Society
- crossref
- conf/icmens/2005
- ee
- https://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.50
- isbn
- 0-7695-2398-6
- url
- http://dblp.uni-trier.de/db/conf/icmens/icmens2005.html#SamsonAKWOB05
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%1 conf/icmens/SamsonAKWOB05
%A Samson, Scott
%A Agarwal, Rahul
%A Kedia, Sunny
%A Wang, Weidong
%A Onishi, Shinzo
%A Bumgarner, John
%B ICMENS
%D 2005
%I IEEE Computer Society
%K dblp
%P 113-120
%T Fabrication Processes for Packaged Optical MEMS Devices.
%U http://dblp.uni-trier.de/db/conf/icmens/icmens2005.html#SamsonAKWOB05
%@ 0-7695-2398-6
@inproceedings{conf/icmens/SamsonAKWOB05,
added-at = {2023-03-24T00:00:00.000+0100},
author = {Samson, Scott and Agarwal, Rahul and Kedia, Sunny and Wang, Weidong and Onishi, Shinzo and Bumgarner, John},
biburl = {https://www.bibsonomy.org/bibtex/2942c2275ab04b559262cfede059ab783/dblp},
booktitle = {ICMENS},
crossref = {conf/icmens/2005},
ee = {https://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.50},
interhash = {d291bbe53fb76f079269ab5ef6241836},
intrahash = {942c2275ab04b559262cfede059ab783},
isbn = {0-7695-2398-6},
keywords = {dblp},
pages = {113-120},
publisher = {IEEE Computer Society},
timestamp = {2024-04-10T21:43:06.000+0200},
title = {Fabrication Processes for Packaged Optical MEMS Devices.},
url = {http://dblp.uni-trier.de/db/conf/icmens/icmens2005.html#SamsonAKWOB05},
year = 2005
}