%0 Conference Paper %1 conf/wsc/PreussNSGL14 %A Preuss, Patrick %A Naumann, André %A Scholl, Wolfgang %A Gan, Boon-Ping %A Lendermann, Peter %B WSC %D 2014 %E Buckley, Stephen J. %E Miller, John A. %I IEEE/ACM %K dblp %P 2444-2453 %T Enhancement of simulation-based semiconductor manufacturing forecast quality through hybrid tool down time modeling. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2014.html#PreussNSGL14

@inproceedings{conf/wsc/PreussNSGL14, added-at = {2021-06-10T00:00:00.000+0200}, author = {Preuss, Patrick and Naumann, André and Scholl, Wolfgang and Gan, Boon-Ping and Lendermann, Peter}, biburl = {https://www.bibsonomy.org/bibtex/274ef134d4c8da4fba274d60a64810ef6/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2014}, editor = {Buckley, Stephen J. and Miller, John A.}, ee = {http://dl.acm.org/citation.cfm?id=2694156}, interhash = {d2f4f002d7d7b43917b50a0a4b5c4d60}, intrahash = {74ef134d4c8da4fba274d60a64810ef6}, keywords = {dblp}, pages = {2444-2453}, publisher = {IEEE/ACM}, timestamp = {2024-04-09T16:45:23.000+0200}, title = {Enhancement of simulation-based semiconductor manufacturing forecast quality through hybrid tool down time modeling.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2014.html#PreussNSGL14}, year = 2014 }