%0 Conference Paper %1 conf/mhs/SakumaA11 %A Sakuma, Shinya %A Arai, Fumihito %B MHS %D 2011 %I IEEE %K dblp %P 60-62 %T Noncontact nanometric positioning of probe tip for continuous stiffness measurement system. %U http://dblp.uni-trier.de/db/conf/mhs/mhs2011.html#SakumaA11 %@ 978-1-4577-1360-6

@inproceedings{conf/mhs/SakumaA11, added-at = {2017-05-25T00:00:00.000+0200}, author = {Sakuma, Shinya and Arai, Fumihito}, biburl = {https://www.bibsonomy.org/bibtex/257817f487cd510a9016bb43e84769767/dblp}, booktitle = {MHS}, crossref = {conf/mhs/2011}, ee = {https://doi.org/10.1109/MHS.2011.6102159}, interhash = {d7df6c584b07e691fd17e719a1983b4e}, intrahash = {57817f487cd510a9016bb43e84769767}, isbn = {978-1-4577-1360-6}, keywords = {dblp}, pages = {60-62}, publisher = {IEEE}, timestamp = {2019-10-17T16:49:21.000+0200}, title = {Noncontact nanometric positioning of probe tip for continuous stiffness measurement system.}, url = {http://dblp.uni-trier.de/db/conf/mhs/mhs2011.html#SakumaA11}, year = 2011 }