%0 Conference Paper %1 conf/3dic/SongHY14 %A Song, Young Sik %A Han, Yunho %A Yim, Tai Hong %B 3DIC %D 2014 %I IEEE %K dblp %P 1-4 %T Conventional magnetron sputtering of metal seed layers on high aspect ratio vias with tilting. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2014.html#SongHY14 %@ 978-1-4799-8472-5

@inproceedings{conf/3dic/SongHY14, added-at = {2017-05-21T00:00:00.000+0200}, author = {Song, Young Sik and Han, Yunho and Yim, Tai Hong}, biburl = {https://www.bibsonomy.org/bibtex/24549f122bd54e4bdd5eff61c3031d01c/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2014}, ee = {https://doi.org/10.1109/3DIC.2014.7152169}, interhash = {e53ca5a85e7c98ab0b02f299159f0962}, intrahash = {4549f122bd54e4bdd5eff61c3031d01c}, isbn = {978-1-4799-8472-5}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2019-10-17T15:31:22.000+0200}, title = {Conventional magnetron sputtering of metal seed layers on high aspect ratio vias with tilting.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2014.html#SongHY14}, year = 2014 }