%0 Journal Article %1 journals/micromachines/VillanuevaVMSSB13 %A Villanueva, Luis Guillermo %A Vazquez-Mena, Oscar %A Martin-Olmos, Cristina %A Savu, Veronica %A Sidler, Katrin %A Brugger, Juergen %D 2013 %J Micromachines %K dblp %N 4 %P 370-377 %T Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography. %U http://dblp.uni-trier.de/db/journals/micromachines/micromachines4.html#VillanuevaVMSSB13 %V 4

@article{journals/micromachines/VillanuevaVMSSB13, added-at = {2023-09-30T00:00:00.000+0200}, author = {Villanueva, Luis Guillermo and Vazquez-Mena, Oscar and Martin-Olmos, Cristina and Savu, Veronica and Sidler, Katrin and Brugger, Juergen}, biburl = {https://www.bibsonomy.org/bibtex/2b1fa7b3594b9d80f6d3cc8952f2f3036/dblp}, ee = {https://doi.org/10.3390/mi4040370}, interhash = {e5ced73350c592dc1ff6410f2a4d41ab}, intrahash = {b1fa7b3594b9d80f6d3cc8952f2f3036}, journal = {Micromachines}, keywords = {dblp}, number = 4, pages = {370-377}, timestamp = {2024-04-08T19:44:12.000+0200}, title = {Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography.}, url = {http://dblp.uni-trier.de/db/journals/micromachines/micromachines4.html#VillanuevaVMSSB13}, volume = 4, year = 2013 }