%0 Conference Paper %1 conf/nems/LiaoLTWX13 %A Liao, Wenjun %A Liu, Wenjing %A Tang, Yongming %A Wang, Baobing %A Xie, Huikai %B NEMS %D 2013 %I IEEE %K %P 969-972 %T Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#LiaoLTWX13

@inproceedings{conf/nems/LiaoLTWX13, added-at = {2023-12-14T15:02:58.000+0100}, author = {Liao, Wenjun and Liu, Wenjing and Tang, Yongming and Wang, Baobing and Xie, Huikai}, biburl = {https://www.bibsonomy.org/bibtex/27ee931e8e7997e882b79e3d2f5c5775d/admin}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559884}, interhash = {e68f3eeb9a62bc10377314703f39720e}, intrahash = {7ee931e8e7997e882b79e3d2f5c5775d}, keywords = {}, pages = {969-972}, publisher = {IEEE}, timestamp = {2023-12-14T15:02:58.000+0100}, title = {Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#LiaoLTWX13}, year = 2013 }