%0 Conference Paper %1 conf/amcc/LiuHHCF20 %A Liu, Yi-Lin %A Huang, Kuan-Wei %A Huang, Ching-Chi %A Chen, Huang-Chih %A Fu, Li-Chen %B ACC %D 2020 %I IEEE %K dblp %P 577-582 %T AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection. %U http://dblp.uni-trier.de/db/conf/amcc/amcc2020.html#LiuHHCF20 %@ 978-1-5386-8266-1

@inproceedings{conf/amcc/LiuHHCF20, added-at = {2020-08-05T00:00:00.000+0200}, author = {Liu, Yi-Lin and Huang, Kuan-Wei and Huang, Ching-Chi and Chen, Huang-Chih and Fu, Li-Chen}, biburl = {https://www.bibsonomy.org/bibtex/2c68ca673d4260b3ce6ba389430dbaa90/dblp}, booktitle = {ACC}, crossref = {conf/amcc/2020}, ee = {https://doi.org/10.23919/ACC45564.2020.9147562}, interhash = {ed58fd4d67e27b37f94c2bab0c54dca3}, intrahash = {c68ca673d4260b3ce6ba389430dbaa90}, isbn = {978-1-5386-8266-1}, keywords = {dblp}, pages = {577-582}, publisher = {IEEE}, timestamp = {2024-04-09T13:43:39.000+0200}, title = {AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection.}, url = {http://dblp.uni-trier.de/db/conf/amcc/amcc2020.html#LiuHHCF20}, year = 2020 }