%0 Thesis %1 dudek1997lithographieunabhngige %A Dudek, Volker %D 1997 %K %T Lithographie-unabhängige MOS-Transistoren mit Kanallängen kleiner 100 nm

@phdthesis{dudek1997lithographieunabhngige, added-at = {2023-12-14T15:44:32.000+0100}, author = {Dudek, Volker}, biburl = {https://www.bibsonomy.org/bibtex/2de5847d35361eec4b23b72b0294e78c8/admin}, dnbtitleid = {950221708}, interhash = {eef36219592b4c13d84959b1282dca7f}, intrahash = {de5847d35361eec4b23b72b0294e78c8}, keywords = {}, school = {Uni Stuttgart}, timestamp = {2023-12-14T15:44:32.000+0100}, title = {Lithographie-unabhängige MOS-Transistoren mit Kanallängen kleiner 100 nm}, year = 1997 }