%0 Journal Article %1 journals/tase/JohannesKCC06 %A Johannes, Matthew S. %A Kuniholm, Jonathan F. %A Cole, Daniel G. %A Clark, Robert L. %D 2006 %J IEEE Trans Autom. Sci. Eng. %K dblp %N 3 %P 236-239 %T Automated CAD/CAM-based nanolithography using a custom atomic force microscope. %U http://dblp.uni-trier.de/db/journals/tase/tase3.html#JohannesKCC06 %V 3

@article{journals/tase/JohannesKCC06, added-at = {2020-04-02T00:00:00.000+0200}, author = {Johannes, Matthew S. and Kuniholm, Jonathan F. and Cole, Daniel G. and Clark, Robert L.}, biburl = {https://www.bibsonomy.org/bibtex/2e0a6e6de6b7fe473168d55bef4ad2470/dblp}, ee = {https://doi.org/10.1109/TASE.2006.875535}, interhash = {f148ebcf5723134d92dc3e5498350bbb}, intrahash = {e0a6e6de6b7fe473168d55bef4ad2470}, journal = {IEEE Trans Autom. Sci. Eng.}, keywords = {dblp}, number = 3, pages = {236-239}, timestamp = {2020-04-03T12:04:17.000+0200}, title = {Automated CAD/CAM-based nanolithography using a custom atomic force microscope.}, url = {http://dblp.uni-trier.de/db/journals/tase/tase3.html#JohannesKCC06}, volume = 3, year = 2006 }