%0 Journal Article %1 journals/sensors/HanKKCH23 %A Han, Chansu %A Koo, Yoonsung %A Kim, Jaehwan %A Choi, Kwangwook %A Hong, Sangjeen %D 2023 %J Sensors %K dblp %N 5 %P 2410 %T Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis. %U http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#HanKKCH23 %V 23

@article{journals/sensors/HanKKCH23, added-at = {2023-03-28T00:00:00.000+0200}, author = {Han, Chansu and Koo, Yoonsung and Kim, Jaehwan and Choi, Kwangwook and Hong, Sangjeen}, biburl = {https://www.bibsonomy.org/bibtex/2fe00081a7d395971fd0bc431bf8c15ab/dblp}, ee = {https://doi.org/10.3390/s23052410}, interhash = {fe7c343e24866a4ccaa3467feee12264}, intrahash = {fe00081a7d395971fd0bc431bf8c15ab}, journal = {Sensors}, keywords = {dblp}, month = {March}, number = 5, pages = 2410, timestamp = {2024-04-09T04:17:57.000+0200}, title = {Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis.}, url = {http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#HanKKCH23}, volume = 23, year = 2023 }