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A Parallel Discrete-Event Simulation of Wafer Fabrication Processes

3rd High Performance Computing (HPC) Asia, : 1180-1189, 1998.
Authors: Chu-Cheow Lim and Yoke-Hean Low and Boon-Ping Gan and Stephen J. Turner and Sanjay Jain and Wentong Cai and Wen Jing Hsu and Shell Ying Huang
URL: http://www3.ntu.edu.sg/home/yhlow/archives/2006/01/entry_46.html
Tags: Discrete Event Fabrication Parallel Processes Simulation discrete simulation
| URL | BibTeX  
@inproceedings{hpc1998,
title = {A Parallel Discrete-Event Simulation of Wafer Fabrication Processes},
author = {Chu-Cheow Lim and Yoke-Hean Low and Boon-Ping Gan and Stephen J. Turner and Sanjay Jain and Wentong Cai and Wen Jing Hsu and Shell Ying Huang},
booktitle = {3rd High Performance Computing (HPC) Asia},
pages = {1180-1189},
url = {http://www3.ntu.edu.sg/home/yhlow/archives/2006/01/entry_46.html},
year = {1998},
keywords = {Discrete Event Fabrication Parallel Processes Simulation discrete simulation }
}