%0 Thesis %1 harrer2008nextgeneration %A Harrer, Stefan %D 2008 %K dnb Ingenieurwissenschaften_und_Maschinenbau %T Next-generation nanoimprint lithography: innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region

@phdthesis{harrer2008nextgeneration, added-at = {2015-09-10T01:51:50.000+0200}, author = {Harrer, Stefan}, biburl = {https://www.bibsonomy.org/bibtex/21db746878d903922e74fac030489e865/genealogie}, dnbtitleid = {99344699X}, interhash = {73a447ba2df03895a6711cc5d9530e38}, intrahash = {1db746878d903922e74fac030489e865}, keywords = {dnb Ingenieurwissenschaften_und_Maschinenbau}, school = {TU München}, timestamp = {2015-09-10T02:31:23.000+0200}, title = {Next-generation nanoimprint lithography: innovative approaches towards improving flexibility and resolution of nanofabrication in the sub-15-nm region}, year = 2008 }