%0 Journal Article %1 journals/mr/LuXLWLT16 %A Lu, Han-Han %A Xu, Jing-Ping %A Liu, Lu %A Wang, Li-Sheng %A Lai, Pui To %A Tang, Wing Man %D 2016 %J Microelectron. Reliab. %K dblp %P 17-21 %T Improved interfacial quality of GaAs metal-oxide-semiconductor device with NH3-plasma treated yittrium-oxynitride as interfacial passivation layer. %U http://dblp.uni-trier.de/db/journals/mr/mr56.html#LuXLWLT16 %V 56

@article{journals/mr/LuXLWLT16, added-at = {2023-09-11T00:00:00.000+0200}, author = {Lu, Han-Han and Xu, Jing-Ping and Liu, Lu and Wang, Li-Sheng and Lai, Pui To and Tang, Wing Man}, biburl = {https://www.bibsonomy.org/bibtex/21b813c2d2fe241e4cc9820dda7c5c13c/dblp}, ee = {https://doi.org/10.1016/j.microrel.2015.10.013}, interhash = {21fdfa90eb0a4287ae300a7d1d4b95e3}, intrahash = {1b813c2d2fe241e4cc9820dda7c5c13c}, journal = {Microelectron. Reliab.}, keywords = {dblp}, pages = {17-21}, timestamp = {2024-04-09T02:48:37.000+0200}, title = {Improved interfacial quality of GaAs metal-oxide-semiconductor device with NH3-plasma treated yittrium-oxynitride as interfacial passivation layer.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr56.html#LuXLWLT16}, volume = 56, year = 2016 }