%0 Thesis %1 phd/ndltd/Hastings03 %A Hastings, Jeffrey Todd %D 2003 %K dblp %T Nanometer-precision electron-beam lithography with applications in integrated optics.

@phdthesis{phd/ndltd/Hastings03, added-at = {2022-05-04T00:00:00.000+0200}, author = {Hastings, Jeffrey Todd}, biburl = {https://www.bibsonomy.org/bibtex/22c3629ce9d5e34b6cd5ad479754a7fa3/dblp}, ee = {https://hdl.handle.net/1721.1/29949}, interhash = {6261def8e7e747b2edcb76caffbfd835}, intrahash = {2c3629ce9d5e34b6cd5ad479754a7fa3}, keywords = {dblp}, note = {ndltd.org (oai:dspace.mit.edu:1721.1/29949)}, school = {Massachusetts Institute of Technology, Cambridge, MA, USA}, timestamp = {2024-04-09T08:08:59.000+0200}, title = {Nanometer-precision electron-beam lithography with applications in integrated optics.}, year = 2003 }