Transparent double-layer heaters that consist of aluminum-doped zinc oxide and fluorine-doped tin oxide films are prepared by electron cyclotron resonance-metal organic chemical vapor deposition and RF-sputtering systems, in sequence. The double-layered transparent conducting oxide film is designed and prepared to achieve both of high conductivity and high-temperature performance. This double-layer structure has lower sheet resistance, due to the grain size increase with respect to the single-layer films. The fluorine-doped tin oxide/aluminum-doped zinc oxide double-layer film shows a sheet resistance as low as 36.7 Ω sq−1, and an optical transmittance of ∼82%, which are suitable properties for low-voltage transparent heaters. Hall measurement results show that the double-layer film has remarkably increased conductivity and decreased resistivity. In addition, the time-versus-temperature profile shows that the performance of the fluorine-doped tin oxide/aluminum-doped zinc oxide double layer is superior to that of the aluminum-doped zinc oxide and fluorine-doped tin oxide single-layer films.
Description
Double-layer effect on electrothermal properties of transparent heaters - Kim - 2014 - physica status solidi (a) - Wiley Online Library
%0 Journal Article
%1 PSSA:PSSA201330517
%A Kim, A-Young
%A Lee, Kyuha
%A Park, Ji Hun
%A Byun, Dongjin
%A Lee, Joong Kee
%D 2014
%J physica status solidi (a)
%K aempl
%N 8
%P 1923--1927
%R 10.1002/pssa.201330517
%T Double-layer effect on electrothermal properties of transparent heaters
%U http://dx.doi.org/10.1002/pssa.201330517
%V 211
%X Transparent double-layer heaters that consist of aluminum-doped zinc oxide and fluorine-doped tin oxide films are prepared by electron cyclotron resonance-metal organic chemical vapor deposition and RF-sputtering systems, in sequence. The double-layered transparent conducting oxide film is designed and prepared to achieve both of high conductivity and high-temperature performance. This double-layer structure has lower sheet resistance, due to the grain size increase with respect to the single-layer films. The fluorine-doped tin oxide/aluminum-doped zinc oxide double-layer film shows a sheet resistance as low as 36.7 Ω sq−1, and an optical transmittance of ∼82%, which are suitable properties for low-voltage transparent heaters. Hall measurement results show that the double-layer film has remarkably increased conductivity and decreased resistivity. In addition, the time-versus-temperature profile shows that the performance of the fluorine-doped tin oxide/aluminum-doped zinc oxide double layer is superior to that of the aluminum-doped zinc oxide and fluorine-doped tin oxide single-layer films.
@article{PSSA:PSSA201330517,
abstract = {Transparent double-layer heaters that consist of aluminum-doped zinc oxide and fluorine-doped tin oxide films are prepared by electron cyclotron resonance-metal organic chemical vapor deposition and RF-sputtering systems, in sequence. The double-layered transparent conducting oxide film is designed and prepared to achieve both of high conductivity and high-temperature performance. This double-layer structure has lower sheet resistance, due to the grain size increase with respect to the single-layer films. The fluorine-doped tin oxide/aluminum-doped zinc oxide double-layer film shows a sheet resistance as low as 36.7 Ω sq−1, and an optical transmittance of ∼82%, which are suitable properties for low-voltage transparent heaters. Hall measurement results show that the double-layer film has remarkably increased conductivity and decreased resistivity. In addition, the time-versus-temperature profile shows that the performance of the fluorine-doped tin oxide/aluminum-doped zinc oxide double layer is superior to that of the aluminum-doped zinc oxide and fluorine-doped tin oxide single-layer films.
},
added-at = {2015-10-08T05:32:21.000+0200},
author = {Kim, A-Young and Lee, Kyuha and Park, Ji Hun and Byun, Dongjin and Lee, Joong Kee},
biburl = {https://www.bibsonomy.org/bibtex/22f438936488916f4926efe69c502b416/l1th1um},
description = {Double-layer effect on electrothermal properties of transparent heaters - Kim - 2014 - physica status solidi (a) - Wiley Online Library},
doi = {10.1002/pssa.201330517},
interhash = {d88d134d1bbf1d28ddf028fca7f15618},
intrahash = {2f438936488916f4926efe69c502b416},
issn = {1862-6319},
journal = {physica status solidi (a)},
keywords = {aempl},
number = 8,
pages = {1923--1927},
timestamp = {2015-10-08T05:32:21.000+0200},
title = {Double-layer effect on electrothermal properties of transparent heaters},
url = {http://dx.doi.org/10.1002/pssa.201330517},
volume = 211,
year = 2014
}