%0 Journal Article %1 journals/tim/YaoZZLYF23 %A Yao, Sheng %A Zhang, Xianmin %A Zhu, Benliang %A Li, Hai %A Yu, Longhuan %A Fatikow, Sergej %D 2023 %J IEEE Trans. Instrum. Meas. %K dblp %P 1-11 %T A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method. %U http://dblp.uni-trier.de/db/journals/tim/tim72.html#YaoZZLYF23 %V 72

@article{journals/tim/YaoZZLYF23, added-at = {2023-01-31T00:00:00.000+0100}, author = {Yao, Sheng and Zhang, Xianmin and Zhu, Benliang and Li, Hai and Yu, Longhuan and Fatikow, Sergej}, biburl = {https://www.bibsonomy.org/bibtex/230ba4c0bd61c1221fd91897c816d6310/dblp}, ee = {https://doi.org/10.1109/TIM.2023.3234038}, interhash = {a7784e1d56cd0462074ae1452bd0c9f4}, intrahash = {30ba4c0bd61c1221fd91897c816d6310}, journal = {IEEE Trans. Instrum. Meas.}, keywords = {dblp}, pages = {1-11}, timestamp = {2024-04-08T14:37:44.000+0200}, title = {A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method.}, url = {http://dblp.uni-trier.de/db/journals/tim/tim72.html#YaoZZLYF23}, volume = 72, year = 2023 }