%0 Conference Paper %1 conf/icmens/GrundkeDPBSWRMPPV05 %A Grundke, Karina %A Drechsler, Astrid %A Petong, Nicole %A Bellmann, Cornelia %A Stamm, Manfred %A Wunnicke, Odo %A Reichelt, Jens %A Mäge, Iris %A Pinter, B. %A Pearce, T. %A Voigt, M. %B ICMENS %D 2005 %I IEEE Computer Society %K dblp %P 14-15 %T On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. %U http://dblp.uni-trier.de/db/conf/icmens/icmens2005.html#GrundkeDPBSWRMPPV05 %@ 0-7695-2398-6

@inproceedings{conf/icmens/GrundkeDPBSWRMPPV05, added-at = {2023-03-24T00:00:00.000+0100}, author = {Grundke, Karina and Drechsler, Astrid and Petong, Nicole and Bellmann, Cornelia and Stamm, Manfred and Wunnicke, Odo and Reichelt, Jens and Mäge, Iris and Pinter, B. and Pearce, T. and Voigt, M.}, biburl = {https://www.bibsonomy.org/bibtex/2345adac3a59a1a968a1a0fc2959c0dea/dblp}, booktitle = {ICMENS}, crossref = {conf/icmens/2005}, ee = {https://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.93}, interhash = {fd9aebd8ec7d6f80efa444f6f4e7e094}, intrahash = {345adac3a59a1a968a1a0fc2959c0dea}, isbn = {0-7695-2398-6}, keywords = {dblp}, pages = {14-15}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T21:43:06.000+0200}, title = {On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists.}, url = {http://dblp.uni-trier.de/db/conf/icmens/icmens2005.html#GrundkeDPBSWRMPPV05}, year = 2005 }