%0 Conference Paper %1 conf/nems/LiZJYZ14 %A Li, Zhikang %A Zhao, Libo %A Jiang, Zhuangde %A Ye, Zhiying %A Zhao, Yulong %B NEMS %D 2014 %I IEEE %K dblp %P 600-603 %T Capacitive micromachined ultrasonic transducer for ultra-low pressure detection. %U http://dblp.uni-trier.de/db/conf/nems/nems2014.html#LiZJYZ14 %@ 978-1-4799-4726-3

@inproceedings{conf/nems/LiZJYZ14, added-at = {2023-11-10T00:00:00.000+0100}, author = {Li, Zhikang and Zhao, Libo and Jiang, Zhuangde and Ye, Zhiying and Zhao, Yulong}, biburl = {https://www.bibsonomy.org/bibtex/240286f3023a53b915c5fb212c57f76ec/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2014}, ee = {https://doi.org/10.1109/NEMS.2014.6908883}, interhash = {46569bd1db62a83c509476bad0330e30}, intrahash = {40286f3023a53b915c5fb212c57f76ec}, isbn = {978-1-4799-4726-3}, keywords = {dblp}, pages = {600-603}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:16.000+0200}, title = {Capacitive micromachined ultrasonic transducer for ultra-low pressure detection.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2014.html#LiZJYZ14}, year = 2014 }