%0 Conference Paper %1 conf/essderc/ScherublSCSS19 %A Scherübl, Thomas %A Sufrin, Yael %A Cohen, Avi %A Sharoni, Ofir %A Seltmann, Rolf %B ESSDERC %D 2019 %I IEEE %K dblp %P 57-60 %T Excursion prevention and increasing device performance using mask correction for intrafield CD and Overlay improvement. %U http://dblp.uni-trier.de/db/conf/essderc/essderc2019.html#ScherublSCSS19 %@ 978-1-7281-1539-9

@inproceedings{conf/essderc/ScherublSCSS19, added-at = {2019-11-28T00:00:00.000+0100}, author = {Scherübl, Thomas and Sufrin, Yael and Cohen, Avi and Sharoni, Ofir and Seltmann, Rolf}, biburl = {https://www.bibsonomy.org/bibtex/24286333317bb0268a5155f39456b827f/dblp}, booktitle = {ESSDERC}, crossref = {conf/essderc/2019}, ee = {https://doi.org/10.1109/ESSDERC.2019.8901766}, interhash = {02c4c2c60d4a34dec38b85276bd19c0d}, intrahash = {4286333317bb0268a5155f39456b827f}, isbn = {978-1-7281-1539-9}, keywords = {dblp}, pages = {57-60}, publisher = {IEEE}, timestamp = {2019-11-29T11:46:13.000+0100}, title = {Excursion prevention and increasing device performance using mask correction for intrafield CD and Overlay improvement.}, url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2019.html#ScherublSCSS19}, year = 2019 }