%0 Journal Article %1 Deinhart_2021 %A Deinhart, Victor %A Kern, Lisa-Marie %A Kirchhof, Jan N %A Juergensen, Sabrina %A Sturm, Joris %A Krauss, Enno %A Feichtner, Thorsten %A Kovalchuk, Sviatoslav %A Schneider, Michael %A Engel, Dieter %A Pfau, Bastian %A Hecht, Bert %A Bolotin, Kirill I %A Reich, Stephanie %A Höflich, Katja %D 2021 %I Beilstein Institut %J Beilstein Journal of Nanotechnology %K FIB HIM myown %P 304--318 %R 10.3762/bjnano.12.25 %T The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication %U https://doi.org/10.3762%2Fbjnano.12.25 %V 12 %X Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.

@article{Deinhart_2021, abstract = {Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.}, added-at = {2021-05-10T14:13:18.000+0200}, author = {Deinhart, Victor and Kern, Lisa-Marie and Kirchhof, Jan N and Juergensen, Sabrina and Sturm, Joris and Krauss, Enno and Feichtner, Thorsten and Kovalchuk, Sviatoslav and Schneider, Michael and Engel, Dieter and Pfau, Bastian and Hecht, Bert and Bolotin, Kirill I and Reich, Stephanie and Höflich, Katja}, biburl = {https://www.bibsonomy.org/bibtex/24acfb5dd41ec76293eadb24e9648fd99/tnfeicht}, description = {BJNANO - The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication}, doi = {10.3762/bjnano.12.25}, interhash = {cdf34c7119413a7d5c6e00b9ff5e4540}, intrahash = {4acfb5dd41ec76293eadb24e9648fd99}, journal = {Beilstein Journal of Nanotechnology}, keywords = {FIB HIM myown}, month = apr, pages = {304--318}, publisher = {Beilstein Institut}, timestamp = {2022-05-04T11:00:03.000+0200}, title = {The patterning toolbox {FIB}-o-mat: Exploiting the full potential of focused helium ions for nanofabrication}, url = {https://doi.org/10.3762%2Fbjnano.12.25}, volume = 12, year = 2021 }