%0 Conference Paper %1 conf/dac/LiuCCJ14 %A Liu, Chi-Yuan %A Chiang, Hui-Ju Katherine %A Chang, Yao-Wen %A Jiang, Jie-Hong R. %B DAC %D 2014 %I ACM %K dblp %P 54:1-54:6 %T Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification. %U http://dblp.uni-trier.de/db/conf/dac/dac2014.html#LiuCCJ14 %@ 978-1-4503-2730-5

@inproceedings{conf/dac/LiuCCJ14, added-at = {2018-11-06T00:00:00.000+0100}, author = {Liu, Chi-Yuan and Chiang, Hui-Ju Katherine and Chang, Yao-Wen and Jiang, Jie-Hong R.}, biburl = {https://www.bibsonomy.org/bibtex/25bbf855b2c5d7c80b9e098f5bcad4a17/dblp}, booktitle = {DAC}, crossref = {conf/dac/2014}, ee = {https://doi.org/10.1145/2593069.2593215}, interhash = {0476b8441e36a045b76b1e5343499139}, intrahash = {5bbf855b2c5d7c80b9e098f5bcad4a17}, isbn = {978-1-4503-2730-5}, keywords = {dblp}, pages = {54:1-54:6}, publisher = {ACM}, timestamp = {2018-11-07T15:14:38.000+0100}, title = {Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification.}, url = {http://dblp.uni-trier.de/db/conf/dac/dac2014.html#LiuCCJ14}, year = 2014 }