%0 Journal Article %1 journals/mr/ZelsacherWBPSKB07 %A Zelsacher, R. %A Wood, A. C. G. %A Bacher, E. %A Prax, E. %A Sorschag, K. %A Krumrey, J. %A Baumgartl, J. %D 2007 %J Microelectron. Reliab. %K dblp %N 9-11 %P 1585-1589 %T A novel SIMS based approach to the characterization of the channel doping profile of a trench MOSFET. %U http://dblp.uni-trier.de/db/journals/mr/mr47.html#ZelsacherWBPSKB07 %V 47

@article{journals/mr/ZelsacherWBPSKB07, added-at = {2020-02-22T00:00:00.000+0100}, author = {Zelsacher, R. and Wood, A. C. G. and Bacher, E. and Prax, E. and Sorschag, K. and Krumrey, J. and Baumgartl, J.}, biburl = {https://www.bibsonomy.org/bibtex/2d3c8325c6afef495a0c0a0b02b66559f/dblp}, ee = {https://doi.org/10.1016/j.microrel.2007.07.001}, interhash = {2607568b4fa750f5cb2e382dda0fdbb9}, intrahash = {d3c8325c6afef495a0c0a0b02b66559f}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-11}, pages = {1585-1589}, timestamp = {2020-02-25T13:22:48.000+0100}, title = {A novel SIMS based approach to the characterization of the channel doping profile of a trench MOSFET.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr47.html#ZelsacherWBPSKB07}, volume = 47, year = 2007 }