Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.
%0 Journal Article
%1 JMI:JMI12224
%A EBERLE, A.L.
%A MIKULA, S.
%A SCHALEK, R.
%A LICHTMAN, J.
%A TATE, M.L. KNOTHE
%A ZEIDLER, D.
%D 2015
%J Journal of Microscopy
%K bio microscopy
%N 2
%P 114--120
%R 10.1111/jmi.12224
%T High-resolution, high-throughput imaging with a multibeam scanning electron microscope
%U http://dx.doi.org/10.1111/jmi.12224
%V 259
%X Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.
@article{JMI:JMI12224,
abstract = {Electron–electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.},
added-at = {2016-01-18T16:34:39.000+0100},
author = {EBERLE, A.L. and MIKULA, S. and SCHALEK, R. and LICHTMAN, J. and TATE, M.L. KNOTHE and ZEIDLER, D.},
biburl = {https://www.bibsonomy.org/bibtex/26f9eeb7017f4cd3ef3f3d148a8361c2b/fezett},
doi = {10.1111/jmi.12224},
interhash = {4ca5e29aeb37d5539e127b6a07403b9a},
intrahash = {6f9eeb7017f4cd3ef3f3d148a8361c2b},
issn = {1365-2818},
journal = {Journal of Microscopy},
keywords = {bio microscopy},
number = 2,
pages = {114--120},
timestamp = {2016-01-18T16:34:39.000+0100},
title = {High-resolution, high-throughput imaging with a multibeam scanning electron microscope},
url = {http://dx.doi.org/10.1111/jmi.12224},
volume = 259,
year = 2015
}