%0 Conference Paper %1 conf/ispd/IkenoMKIIA13 %A Ikeno, Rimon %A Maruyama, Takashi %A Komatsu, Satoshi %A Iizuka, Tetsuya %A Ikeda, Makoto %A Asada, Kunihiro %B ISPD %D 2013 %E Koh, Cheng-Kok %E Sze, Cliff C. N. %I ACM %K dblp %P 69-76 %T A structured routing architecture and its design methodology suitable for high-throughput electron beam direct writing with character projection. %U http://dblp.uni-trier.de/db/conf/ispd/ispd2013.html#IkenoMKIIA13 %@ 978-1-4503-1954-6

@inproceedings{conf/ispd/IkenoMKIIA13, added-at = {2018-11-06T00:00:00.000+0100}, author = {Ikeno, Rimon and Maruyama, Takashi and Komatsu, Satoshi and Iizuka, Tetsuya and Ikeda, Makoto and Asada, Kunihiro}, biburl = {https://www.bibsonomy.org/bibtex/26fa5c4917eb40cb93cdb8da8b4a7b89e/dblp}, booktitle = {ISPD}, crossref = {conf/ispd/2013}, editor = {Koh, Cheng-Kok and Sze, Cliff C. N.}, ee = {https://doi.org/10.1145/2451916.2451937}, interhash = {1e5bdf0a1714606f674c2110cf6fdedf}, intrahash = {6fa5c4917eb40cb93cdb8da8b4a7b89e}, isbn = {978-1-4503-1954-6}, keywords = {dblp}, pages = {69-76}, publisher = {ACM}, timestamp = {2018-11-07T14:00:12.000+0100}, title = {A structured routing architecture and its design methodology suitable for high-throughput electron beam direct writing with character projection.}, url = {http://dblp.uni-trier.de/db/conf/ispd/ispd2013.html#IkenoMKIIA13}, year = 2013 }