%0 Conference Paper %1 conf/nems/XieJWCC13 %A Xie, Bo %A Jiao, Hailong %A Wang, Junbo %A Chen, Deyong %A Chen, Jian %B NEMS %D 2013 %I IEEE %K dblp %P 1271-1274 %T An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#XieJWCC13

@inproceedings{conf/nems/XieJWCC13, added-at = {2023-10-23T00:00:00.000+0200}, author = {Xie, Bo and Jiao, Hailong and Wang, Junbo and Chen, Deyong and Chen, Jian}, biburl = {https://www.bibsonomy.org/bibtex/2a24b7bbb44b942c21abba4b224f4b675/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559949}, interhash = {08e97fa9098ad11775a7a1095bd948f2}, intrahash = {a24b7bbb44b942c21abba4b224f4b675}, keywords = {dblp}, pages = {1271-1274}, publisher = {IEEE}, timestamp = {2024-04-10T19:55:39.000+0200}, title = {An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#XieJWCC13}, year = 2013 }