%0 Journal Article %1 :/content/aip/journal/apl/70/2/10.1063/1.118351 %A Kalff, Matthias %A Breeman, Marinus %A Morgenstern, Markus %A Michely, Thomas %A Comsa, George %D 1997 %J Applied Physics Letters %K morgenstern %N 2 %P 182-184 %R http://dx.doi.org/10.1063/1.118351 %T Effect of energetic particles on island formation in sputter deposition of Pt on Pt(111) %U http://scitation.aip.org/content/aip/journal/apl/70/2/10.1063/1.118351 %V 70 %X During ion beamsputter deposition besides the deposited atoms, which reach the substrate with kinetic energies in the 10 eV range, a certain amount of energetic particles also hit the substrate. These particles which have been reflected or sputtered at the target represent only a small fraction of the atoms reaching the substrate, but have energies of the order of the sputteringbeam. The influence of these particles on the island formation of Pt films on a Pt(111) surface has been examined by variation of the deposition geometry, the primary ion energy, and the substrate temperature. It is demonstrated that the main effect is a dramatic increase in island density. The experimental results are in quantitative agreement with the results of a newly developed computer code.

@article{:/content/aip/journal/apl/70/2/10.1063/1.118351, abstract = {During ion beamsputter deposition besides the deposited atoms, which reach the substrate with kinetic energies in the 10 eV range, a certain amount of energetic particles also hit the substrate. These particles which have been reflected or sputtered at the target represent only a small fraction of the atoms reaching the substrate, but have energies of the order of the sputteringbeam. The influence of these particles on the island formation of Pt films on a Pt(111) surface has been examined by variation of the deposition geometry, the primary ion energy, and the substrate temperature. It is demonstrated that the main effect is a dramatic increase in island density. The experimental results are in quantitative agreement with the results of a newly developed computer code.}, added-at = {2015-03-17T01:20:15.000+0100}, author = {Kalff, Matthias and Breeman, Marinus and Morgenstern, Markus and Michely, Thomas and Comsa, George}, biburl = {https://www.bibsonomy.org/bibtex/2d82e9836cdfa094ae80d9f4a1ef78169/institut2b}, description = {Effect of energetic particles on island formation in sputter deposition of Pt on Pt(111)}, doi = {http://dx.doi.org/10.1063/1.118351}, eid = {182}, interhash = {c40cabb3dcb93c83019a2f327492c6f6}, intrahash = {d82e9836cdfa094ae80d9f4a1ef78169}, journal = {Applied Physics Letters}, keywords = {morgenstern}, number = 2, pages = {182-184}, timestamp = {2015-03-17T01:20:15.000+0100}, title = {Effect of energetic particles on island formation in sputter deposition of Pt on Pt(111)}, url = {http://scitation.aip.org/content/aip/journal/apl/70/2/10.1063/1.118351}, volume = 70, year = 1997 }