%0 Conference Paper %1 conf/isqed/SukharevMKMKCLHOKK09 %A Sukharev, Valeriy %A Markosian, Ara %A Kteyan, Armen %A Manukyan, Levon %A Khachatryan, Nikolay %A Choy, Jun-Ho %A Lazaryan, Hasmik %A Hovsepyan, Henrik %A Onoue, Seiji %A Kikuchi, Takuo %A Kamigaki, Tetsuya %B ISQED %D 2009 %I IEEE Computer Society %K dblp %P 156-161 %T Control of design specific variation in etch-assisted via pattern transfer by means of full-chip simulation. %U http://dblp.uni-trier.de/db/conf/isqed/isqed2009.html#SukharevMKMKCLHOKK09 %@ 978-1-4244-2952-3

@inproceedings{conf/isqed/SukharevMKMKCLHOKK09, added-at = {2023-03-23T00:00:00.000+0100}, author = {Sukharev, Valeriy and Markosian, Ara and Kteyan, Armen and Manukyan, Levon and Khachatryan, Nikolay and Choy, Jun-Ho and Lazaryan, Hasmik and Hovsepyan, Henrik and Onoue, Seiji and Kikuchi, Takuo and Kamigaki, Tetsuya}, biburl = {https://www.bibsonomy.org/bibtex/2d94687748a09f5736aa7de6b96435a8e/dblp}, booktitle = {ISQED}, crossref = {conf/isqed/2009}, ee = {https://www.wikidata.org/entity/Q60154780}, interhash = {4afedf20013a65b4bce686afd1db374d}, intrahash = {d94687748a09f5736aa7de6b96435a8e}, isbn = {978-1-4244-2952-3}, keywords = {dblp}, pages = {156-161}, publisher = {IEEE Computer Society}, timestamp = {2024-04-10T14:09:30.000+0200}, title = {Control of design specific variation in etch-assisted via pattern transfer by means of full-chip simulation.}, url = {http://dblp.uni-trier.de/db/conf/isqed/isqed2009.html#SukharevMKMKCLHOKK09}, year = 2009 }