%0 Conference Paper %1 conf/nems/BonitzBHSGHW16 %A Bonitz, Jens %A Böttger, Simon %A Hermann, Sascha %A Schulz, Stefan E. %A Gessner, Thomas %A Hartmann, Steffen %A Wunderle, Bernhard %B NEMS %D 2016 %I IEEE %K dblp %P 595-599 %T Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems. %U http://dblp.uni-trier.de/db/conf/nems/nems2016.html#BonitzBHSGHW16 %@ 978-1-5090-1947-2

@inproceedings{conf/nems/BonitzBHSGHW16, added-at = {2023-09-30T00:00:00.000+0200}, author = {Bonitz, Jens and Böttger, Simon and Hermann, Sascha and Schulz, Stefan E. and Gessner, Thomas and Hartmann, Steffen and Wunderle, Bernhard}, biburl = {https://www.bibsonomy.org/bibtex/2e418b38891657e701f69736637782202/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2016}, ee = {https://doi.org/10.1109/NEMS.2016.7758322}, interhash = {e05100b5b2a8c08c3c1c10c3dc25269c}, intrahash = {e418b38891657e701f69736637782202}, isbn = {978-1-5090-1947-2}, keywords = {dblp}, pages = {595-599}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:28.000+0200}, title = {Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2016.html#BonitzBHSGHW16}, year = 2016 }