Abstract
n this article, we describe a technique using NiSi and Pt thin film
metal thermometers to provide accurate temperature information on
a nanosecond time scale during pulsed laser processing of materials.
A surface layer of interest is deposited onto the thermometer layer,
and temperatures are determined from temperature dependent changes
in the metal film's resistance. Details concerning the design and
fabrication of the device structure and experimental considerations
in making nanosecond resolved resistance measurements are discussed.
Simple analytical estimates are presented to extract quantities such
as incident laser energy stored in the sample. Finally, transient
temperature data in the thermometer film, in combination with heat
flow calculations, allow temperature determination as a function
of time and depth into the sample and, additionally, can provide
information about material properties of the surface layer.
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