%0 Journal Article %1 journals/chinaf/HanWZSHMI12 %A Han, Dedong %A Wang, Yi %A Zhang, Shengdong %A Sun, Lei %A Han, Ruqi %A Matsumoto, Satoru %A Ino, Yuji %D 2012 %J Sci. China Inf. Sci. %K dblp %N 4 %P 951-955 %T Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. %U http://dblp.uni-trier.de/db/journals/chinaf/chinaf55.html#HanWZSHMI12 %V 55

@article{journals/chinaf/HanWZSHMI12, added-at = {2023-06-26T00:00:00.000+0200}, author = {Han, Dedong and Wang, Yi and Zhang, Shengdong and Sun, Lei and Han, Ruqi and Matsumoto, Satoru and Ino, Yuji}, biburl = {https://www.bibsonomy.org/bibtex/2b3e02c03d702c60c2f0dafd4d971805f/dblp}, ee = {https://doi.org/10.1007/s11432-011-4347-z}, interhash = {42d5d864fdca34c58c4f3126ce8c835c}, intrahash = {b3e02c03d702c60c2f0dafd4d971805f}, journal = {Sci. China Inf. Sci.}, keywords = {dblp}, number = 4, pages = {951-955}, timestamp = {2024-04-08T20:27:07.000+0200}, title = {Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature.}, url = {http://dblp.uni-trier.de/db/journals/chinaf/chinaf55.html#HanWZSHMI12}, volume = 55, year = 2012 }