%0 Journal Article %1 journals/tcad/KomatsuS87 %A Komatsu, Kazuhiko %A Suzuki, Masanori %D 1987 %J IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. %K dblp %N 1 %P 145-151 %T The Outline Procedure in Pattern Data Preparation for Vector-Scan Electron-Beam Lithography. %U http://dblp.uni-trier.de/db/journals/tcad/tcad6.html#KomatsuS87 %V 6

@article{journals/tcad/KomatsuS87, added-at = {2021-03-12T00:00:00.000+0100}, author = {Komatsu, Kazuhiko and Suzuki, Masanori}, biburl = {https://www.bibsonomy.org/bibtex/2697e9363e707ccc56d8425871a5eaf8f/dblp}, ee = {https://doi.org/10.1109/TCAD.1987.1270256}, interhash = {46c8863d2cc33e79df3f9080370f6ba6}, intrahash = {697e9363e707ccc56d8425871a5eaf8f}, journal = {IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.}, keywords = {dblp}, number = 1, pages = {145-151}, timestamp = {2024-04-08T19:46:16.000+0200}, title = {The Outline Procedure in Pattern Data Preparation for Vector-Scan Electron-Beam Lithography.}, url = {http://dblp.uni-trier.de/db/journals/tcad/tcad6.html#KomatsuS87}, volume = 6, year = 1987 }