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%0 Thesis
%1 kruger1998mikrostrukturierung
%A Krüger, Michael
%D 1998
%K
%T Mikrostrukturierung von porösem Silicium für optische und optoelektronische Anwendungen
@phdthesis{kruger1998mikrostrukturierung,
added-at = {2023-12-12T22:23:08.000+0100},
author = {Krüger, Michael},
biburl = {https://www.bibsonomy.org/bibtex/22bcd01d2c6e87967c7c4808a25a65951/admin},
dnbtitleid = {95471749X},
interhash = {49bfd9534a5c6af493df2de8945714b3},
intrahash = {2bcd01d2c6e87967c7c4808a25a65951},
keywords = {},
school = {TU Aachen},
timestamp = {2023-12-12T22:23:08.000+0100},
title = {Mikrostrukturierung von porösem Silicium für optische und optoelektronische Anwendungen},
year = 1998
}