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%0 Journal Article
%1 journals/access/TinTYKTWLTTP21
%A Tin, Tze Chiang
%A Tan, Saw Chin
%A Yong, Hing
%A Kim, Jimmy Ook Hyun
%A Teo, Eric Ken Yong
%A Wong, Joanne Ching Yee
%A Lee, Ching Kwang
%A Than, Peter
%A Tan, Angela Pei San
%A Phang, Siew Chee
%D 2021
%J IEEE Access
%K dblp
%P 114255-114266
%T The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing.
%U http://dblp.uni-trier.de/db/journals/access/access9.html#TinTYKTWLTTP21
%V 9
@article{journals/access/TinTYKTWLTTP21,
added-at = {2021-09-02T00:00:00.000+0200},
author = {Tin, Tze Chiang and Tan, Saw Chin and Yong, Hing and Kim, Jimmy Ook Hyun and Teo, Eric Ken Yong and Wong, Joanne Ching Yee and Lee, Ching Kwang and Than, Peter and Tan, Angela Pei San and Phang, Siew Chee},
biburl = {https://www.bibsonomy.org/bibtex/223f4649f6a7772579b98de3759e50b12/dblp},
ee = {https://doi.org/10.1109/ACCESS.2021.3103235},
interhash = {4b8b3a0050e4729cf9230303b3a99bb2},
intrahash = {23f4649f6a7772579b98de3759e50b12},
journal = {IEEE Access},
keywords = {dblp},
pages = {114255-114266},
timestamp = {2024-04-08T14:03:02.000+0200},
title = {The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing.},
url = {http://dblp.uni-trier.de/db/journals/access/access9.html#TinTYKTWLTTP21},
volume = 9,
year = 2021
}